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Literature

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ALUMINUM BOX PLASMA TOOLS:

• Aluminum Reactor Chamber 14" Cube
• Aluminum Reactor Chamber 18" Cube
• Aluminum Reactor Chamber 24" Cube
• Aluminum Reactor Chamber 30" Cube 

QUARTZ BARREL PLASMA SYSTEMS:

• SCE-100 4", 6", 8" Series Plasma System
• SCE-108 8" x 8" Plasma System 
• SCE-110 10" x 18" Barrel Plasma System 
• SCE-115 15" x 18" Barrel Plasma System
• SCE-150 10" x 18" De-Scum
• SCE-604 (4) 4" x 8" Chambers in 1 System

CUSTOM SUBSTRATE FIXTURES: Quartz Barrel Systems

• Custom Substrate Fixtures
• Quartz Chamber Accessories

TUMBLER PLASMA REACTOR SYSTEMS:

• Tumbler Reactor Plasma System 10" X 18" 
• Industrial Tumbler Reactor Plasma System 18" x 40"

SEM / TEM SAMPLE PREPARATION 
HUMMER® SPUTTER COATING & CARBON EVAPORATIVE SYSTEMS:

• HUMMER® 6.2
• HUMMER® 6.6
• HUMMER® 8.0
• HUMMER® CDS 2- Carbon Deposition System
• HUMMER® CEA - Carbon Evaporation Accessory

HUMMER® R&D, PILOT PRODUCTION SPUTTERING SYSTEMS:

• HUMMER® 6.6 Turbo
• HUMMER® 8.1,2,3
• HUMMER® BC 16
• HUMMER® BC 20
• HUMMER® BC 24

SAMPLE STAGE - HEATED, ROTATING, TILT & ACCESORIES:

• Heated Sample Stage 4-Inch 800°C Hummer Series 
• Heated Sample Stage 6-Inch 200°C Hummer BC Series
• Tilt / Rotate Stage HUMMER 6.2 & 6.6 SEM Coater
• Load Lock Single Wafer 200
• Load Lock Single Wafer Auto 300
• Load Lock Carousel