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SCE 14 Aluminum Chamber Plasma System

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Reactor Chamber 14" Aluminum

• Shelves can be configured for primary or downstream plasma
• 14" Cube aluminum chamber
• Multiple shelves (4)
• Front loading
• View port on front door with UV shield

Control System

• Siemens S7-200 control package
• PLC based for ease of operation 
• "Touch-Panel" interface with digital display
• Process memory on board
• Pass word protected 
• Gas flow with Mass Flow Controller
• Safety interlocks for door, vacuum and power

RF Power Source

• 0-600 Watt, 13.56 MHz
• Auto-Tune matching network 
• Forward and reflected power reading
• 3% Power regulation
• Optional: 300 or 1000 Watt 13.56 MHz

Control System Options

• Additional gas channels
• Capacitance manometer
• Temperature sensor
• Throttle valve
• Nitrogen backfill

Dimensions

• Cabinet: 559-mm x 686-mm x 915-mm (w,d,h)
• Pump 30" L x 12" W x 18" H
• Shipping weight, 600  lbs Crated weight

Vacuum System

• 23.30 CFM Standard service with all interconnects
• Oxygen Preparation to Class "B" Specification