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SCE 18 Aluminum Chamber Plasma System

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Reactor Chamber 18" Aluminum

• Shelves can be configured for primary or downstream plasma
• 18" Cube aluminum chamber
• Multiple shelves (6) 
• Front loading
• View port on front door with UV shield

Control System

• Siemens S7-200 Control package
• PLC based for ease of operation
• "Touch-Panel" interface with digital display
• Process memory on board
• Pass word protected
• Gas flow with mass flow controller
• Safety interlocks for door, vacuum and power

RF Power Source

• 0-600 Watt, 13.56 MHz
• Auto-Tune matching network 
• Forward and reflected power reading
• 3% Power regulation
• Optional: 1000 Watt 13.56 MHz supply

Control System Options

• Additional gas channels
• Capacitance manometer
• Temperature sensor
• Throttle valve
• Nitrogen backfill
• Slow pump and particle reduction

Dimensions

• Cabinet 711-mm x 711-mm x 1651-mm (w,d,h)
• Pump 30" L x 12" W x 18" H
• Shipping weight   1050  lbs Crated

Vacuum System

• 42.4 CFM Standard service with all interconnects
• Oxygen Preparation To Class "B" Specifications