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SCE 24 Aluminum Chamber Plasma System

Reactor Chamber 24" Aluminum

• Shelves can be configured for primary or downstream plasma
• 24" Cube aluminum chamber
• Multiple shelves (6)
• Front loading
• View port on front door with UV shield

Control System

• Siemens S7-200 Control package
• PLC based for ease of operation 
• "Touch-Panel" interface with digital display
• Process memory on board
• Pass word protected 
• Gas flow with mass flow controller
• Selectable gas correction via S7-200
• Safety interlocks for door, vacuum and power

RF Power Source

• 0-1000 Watt, 13.56 MHz
• Auto-Tune matching network 
• Forward and reflected power reading

Control System Options

• Additional gas channels
• Capacitance manometer
• Temperature sensor
• Throttle valve
• Nitrogen backfill

Dimensions

• Cabinet 864-mm x 813-mm x 1829-mm (w,d,h) 
• Pump 30" L x 12" W x 18" H
• Shipping weight  1200  lbs Crated

Vacuum System

• 85 CFM Standard service with all interconnects

Vacuum System Options

• Oxygen service
• Corrosive service
• Mist filter