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SCE 30 Aluminum Chamber Plasma System

• Shelves can be configured for primary or downstream plasma
• 30" Cube aluminum chamber
• Multiple shelves (8)
• Front loading
• View port on front door with UV shield

Control System

• Siemens S7-200 Control package
• PLC based for ease of operation 
• "Touch-Panel" interface with digital display
• Process memory on board
• Pass word protected 
• Gas flow with mass flow controller
• Selectable gas correction via S7-200 
• Safety interlock for door, vacuum and power

RF Power Source

• 0-1000 Watt, 13.56 MHz
• Auto-Tune matching network 
• Forward and reflected power reading

Control System Options

• Additional gas channels
• Capacitance manometer
• Temperature sensor
• Throttle valve
• Nitrogen backfill

Vacuum System

• 66 CFM Dry mechanical pump
• Size dependent upon application

Vacuum System Options

• Corrosive service
• Mist filter

Dimensions

• Cabinet 915-mm x 915-mm x 1829-mm (w,d,h)
• Pump 30" x 12" x 18" (l,w,h)
• Shipping weight 1600 Lbs. crated