Hummer 6.6 Turbo

Download Hummer 6.6 Turbo PDF:

• Siemens Industrial S7, PLC control with "Touch-Panel" operator interface, standard on next generation 6.6 Turbo sputter systems (SEE PDF) 
• Single source Planar Magnetron thin film deposition system
• Cabinet dimensions (inches) 21 x 21 x 25 high
• Mechanical pump is external to the cabinet
• Turbo pump is internal to the cabinet
• Two-inch diameter Planar Magnetron sputter source
• Source shutter assembly incuded
• Hinged top plate assemby for easy target change and cleaning
• Removable chamber assembly for cleaning
• Rotating Sample Stage - nominal 8-inch diameter for 200-mm substrate
• Stage rotation 0-20 RPM variable speed
• Precision Needle Valve for process gas metering
• RF, DC or RF/DC power sources available
  
• OPTIONS:
• Oxygen preparation for reactive sputtering
• Mass Flow Controllers 
• Heated Stage assembly - 4-inch diameter, ambient to 800°C 
• Heated / Rotating stage assembly - 4-inch diameter, ambient to 800°C
• Coolant chiller