Box Coaters

Thin Fim Deposition: "D" Style Box Chamber Systems. Standard "sputter-down" configuration. Optional Sputter up or side configuration.

• Chambers:
  Systems are available in; 16, 20, 24 and 30-inch, "D"-style chamber sizes.
  Stainless steel chamber construction with aluminium door and 4-inch shuttered view port. Ports for vacuum pumping and instrumentation.
  Sputter sources are 2, 3 and 4-inch diameter (based on system size or application), flex mounted for variable angel of incidence.
  Optional: Multiple sources in linear configurations available.  
  
• Controls:
  Siemens S7-200 series PLC based contro for  vacuum function and sputtering.  Fully integrated "Touch-Panel" interface control pad for setting system parameters and diagnostics. Password protection.
  
• Safety:
  Safety interlocks for door, power, water and vacuum.
    
• Power Supply:
  RF generator 300-watts, 13.56 MHz standard.
  DC power 1500-watts.
  Optional: RF 600 or 1000 watts. DC power 2500-watts.
  
• Mass Flow Controller:
  Mass flow controls, 100 - SCCM. Up to three (3) gasses maximum.
  
• Cooling Water:
  GPM - .2 to 10 Gallons
  
• Pumping:
  Remote located mechanical roughing pump can be placed outside the cleanroom environment. Turbomolecular pump internal to the system cabinet.
  Optional: Cryogenic pump or larger pumps based on process requirements.
  
• Electrical Requirements:
  208-240-VAC, 50/60 Hz., 40-75-Amps