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Custom Magnetron Sputter Systems

Anatech manufactures sputtering systems which are specified around your requirements. Our process, control and system engineers use standard system platforms, add standard or custom modules depending on your application, your process, and your throughput requirements, and build the right tool for your particular job.

Applications:

SEM sample preparation, CV Dot Matrix, Sputtering thin film layers for both metals and insulators in R&D and low volume production.

Standard system platforms include:

Sputter platforms

• DC sputter, 0 - 60, 500, 1000, 5000 Watts
• 13.56 MHz RF sputter, 0 - 100, 150, 300, 600, 1250, 3000 Watts
• 1", 2", 3", 4", 6" diameter sputter sources
• Rectangular sources on request

Chamber platforms

• Aluminum or stainless steel
  - 8" or 12" substrate capable
• Borosilicate glass
  - 3" or 8" diameter substrate capable

Substrate holder platforms

• Up to 12" diameter capable
• Heated, cooled
• Stationary, rotating
• Ion assist

Control platforms

• Manual
• PLC automated
• PC automated