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Hummer Sputter Systems

Hummer 6.2 Sputter System
Hummer 6.6 Sputter System
Hummer 8.0 Sputter System

Hummer 8.1 DC Sputter System
Hummer 8.2 RF Sputter System
Hummer 8.3 DC/RF Sputter System
Hummer 12 Sputter System

Hummer Box Coater (BC Series)
Custom Magnetron Sputter Systems

Anatech manufactures sputtering systems which are specified around your requirements. Our process, control and system engineers use standard system platforms, add standard or custom modules depending on your application, your process, and your throughput requirements, and build the right tool for your particular job. 

 

Applications:
SEM sample preparation, CV Dot Matrix, Sputtering thin film layers for both metals and insulators in R&D and small produstion.

Standard system platforms include:

Sputter platforms:
- DC sputter, 0 - 60, 500, 1000, 5000 Watts
- 13.56 MHz RF sputter, 0 - 100, 150, 300, 600, 1250, 3000 Watts
- 1", 2", 3", 4", 6" diameter sputter sources
- Rectangular sources on request

Chamber platforms:
Aluminum or stainless steel
- 8" or 12" substrate capable

Borosilicate glass
- 3" or 8" diameter substrate capable

Substrate holder platforms
- Up to 12" diameter capable
- Heated, cooled
- Stationary, rotating
- Ion assist

Control platforms
- Manual
- PLC automated
- PC automated

Pump platforms
Roughing 1 cfm to 57 cfm
High vacuum 70 lps to 1000 lps
Turbomolecular, cryogenic or diffusion pumps are application dependent.
Reactive and corrosive service are application dependent.

Options:
Application dependent