Hummer Sputter Systems

SEM / TEM SAMPLE PREPARATION:
Hummer 6.2 Sputter System
Hummer 6.6 Sputter System
Hummer 8.0 Sputter System

X-RAY ANALYSIS:
Carbon Deposition / Evaporation

BENCH TOP SPUTTER SYSTEMS:
Hummer 6.6 Turbo

R&D SPUTTER SYSTEMS:
Hummer 8.1 DC Sputter System
Hummer 8.2 RF Sputter System
Hummer 8.3 DC/RF Sputter System
Hummer 12 Sputter System

R&D, PILOT PRODUCTION SYSTEMS:
Hummer Box Chamber Sputter System (BC Series)
Custom Deposition Systems

CUSTOM SYSTEMS:
Evaporation Systems

Anatech USA sputtering systems are manufactured to meet your specific requirements.
Our process, control and system engineers use standard system platforms, add standard or custom modules, depending on your application, your process, and your throughput requirements. Anatech USA builds the right tool for your particular job. 

APPLICATIONS:
-SEM sample preparation, Photovoltaics, Materials Research, Renewable Energy, Microelectronics, CV Dot Matrix,

-Sputtering thin film layers for both Metals and Insulators
-High quality, dependable box systems for R&D and Pilot Production.
-Hummer 6.6 RF Turbo bench-top system shown in photo - (right)
Download HUMMER 6.6RF TURBO PDF: 

STANDARD SYSTEM PLATFORMS include:

Sputter Platforms:
- DC sputter: 0 - 60, 500, 1500, 5000 Watts
- RF sputter: 13.56 MHz, 0 - 100, 150, 300, 600, 1000, 3000 Watts
- Source Sizes:1", 2", 3", 4", 6" diameter sputter sources
- Rectangular sources on request

Chamber Platforms:
-Aluminum or Stainless Steel

Substrate Capable:
-Size range 4", 6", 8" or 12" substrates

Borosilicate Glass:
- 3" or 8" diameter substrate capable

Substrate Holder Platforms:
- Up to 12" diameter capable
- Heated, cooled
- Stationary, rotating
- Ion assist

Control Platforms:
- Manual
- "Touch-Panel" PLC automated
- PC automated

Pump Platforms:
-Roughing 1.5 cfm to 66 cfm
-High vacuum 81 l/ps to 1000 l/ps
-Turbomolecular, Cryogenic or Diffusion pumps are application dependent.
-Reactive and Corrosive service are application dependent.

Options:
-Application dependent