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SCE 108 Quartz Barrel Plasma System

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         SCE-108 Flyer

Control System

  • PLC "Touch-Panel" operation
  • Digital Count-Down timer (hrs, min, sec)
  • Digital On-Screen vacuum display
  • Gas flow with needle valve control
  • Manual tuning standard
  • Optional: Automatic RF Tuning for load match

Reactor Chamber

  • 8" diameter x 8" long quartz chamber
  • RF shielded
  • Front loading

Dimensions

  • 26"H x 23"W x 30"D
  • 275-Lbs. crated

RF Power Supply

  • 0-150 Watt RF 13.56 MHz supply
  • Forward and reflected power readings
  • Optional: Low frequency

Vacuum System

  • 3.8CFM standard service pump
  • 1 phase 50/60 120/208 VAC
  • Package with all interconnecting hardware
  • Optional: Oxygen service. Class "B" preparation

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