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SCE 108 Quartz Barrel Plasma System
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Control System
- PLC "Touch-Panel" operation
- Digital Count-Down timer (hrs, min, sec)
- Digital On-Screen vacuum display
- Gas flow with needle valve control
- Manual tuning standard
- Optional: Automatic RF Tuning for load match
Reactor Chamber
- 8" diameter x 8" long quartz chamber
- RF shielded
- Front loading
Dimensions
- 26"H x 23"W x 30"D
- 275-Lbs. crated
RF Power Supply
- 0-150 Watt RF 13.56 MHz supply
- Forward and reflected power readings
- Optional: Low frequency
Vacuum System
- 3.8CFM standard service pump
- 1 phase 50/60 120/208 VAC
- Package with all interconnecting hardware
- Optional: Oxygen service. Class "B" preparation