Home > Products > Quartz Barrel Plasma Systems > SCE 110 Quartz Barrel Plasma System

SCE 110 Quartz Barrel Plasma System

        SCE-110 Flyer
Control System

• PLC - "Touch-Panel" operation 
• Digital display of power, vacuum, gas flow and time
• Gas Mass Flow Controllers (2) 500-sccm
• Multiple recipes - on board memory 
• Pass word protection
• Safety interlock for vacuum and power
• 120-VAC, 50/60-Hz, 20-Amp

Control System Options

• Additional gas channels - (Up to 3) 
• Capacitance manometer
• Temperature sensor
• Throttle valve

RF Power Source

• 0-600 Watt, 13.56 MHz
• Forward and reflected power reading
• 3% Power regulation
• Automatic RF Tuner for load match

Reactor Chamber

• Quartz chamber
• 10" dia x 18" L
• Front loading
• View port on front door with UV shield

Reactor Chamber Options:

• Planar electrode
• Quartz trays or rails, (Up to 3 trays)

Dimensions

• System contained in a standard 19 inch half rack
• 36"H x 21"W x 30"D

Vacuum System

• Electro-pneumatic vacuum valve 
• 23.3 CFM Standard service with all interconnects
• 115 or 208-VAC, 1-phase, 20-Amp 

Vacuum System Options

• Oxygen service
• Corrosive service
• Nitrogen back fill
• Slow Pump particle reduction
• Mist eliminator