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SCE 115 Quartz Barrel Plasma System

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Control System

• PLC - "Touch-Panel" operation
• Digital display of power, vacuum, gas flow and time
• Multiple recipes - on board memory 
• Pass word protection
• Gas Mass Flow Controllers, (2) 500-sccm 
• Safety interlock for vacuum and power

Control System Options

• Additional gas channels - (Up to 3) 
• Capacitance manometer
• Temperature sensor
• Throttle valve

Dimensions

• Standard 30" Equipment rack
• 22" W x 36" H x 27" D
• Pump 30" L x 12" W x 18" H
• Shipping weight — 1000  lbs Crated weight 

Reactor Chamber

• 10" x 18" quartz chamber
• Front loading
• View port on door with UV shield
• Planar plate electrodes - (1 Hot, 1-Ground)

Reactor Chamber Options

• Water cooled electrode

RF Power Source

• 0-600 Watt, 13.56 MHz
• Forward and reflected power reading
• 3% Power regulation
• Automatic RF Tuner for load match 

RF Power Options

• 300 Watt, 13.56 MHz
• 1000 Watt 13.56 MHz

Vacuum System

• 23.3 CFM mechanical pump with all
  interconnects
• Oxygen Service - Class "B" preparation
• 115 or 208-VAC, 1-phase, 20-Amp

Vacuum System Options

• Slow pump particle reduction
• Fast vent
• Chiller / recirculator
• Nitrogen back fill
• Corrosive service
• Mist eliminater