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SCE 104 Quartz Barrel Plasma System

         SCE 104 Flyer
Control System

• PLC  - "Touch-Panel" operation
• Digital count down timer (hrs, min, sec)
• Digital On-Screen vacuum display
• Gas flow with needle valve control
• Manual tuning standard
• Optional: Automatic RF tuning for load match

Reactor Chamber

• 4" diameter x 8" long quartz chamber
• RF shielded
• Front load

Dimensions

• 26" H x 23" W x 30" D
• 275 lbs Crated weight

RF Power Source

• 0-150 Watt RF 13.56 MHz supply
• Forward and reflected power readings
• Low frequency optional

Vacuum System

• 3.8 CFM Standard service pump
• 1 Phase 50/60 120/208 VAC
• Package with all interconnecting hardware
• Optional: Oxygen service. Class "B" Preparation