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SCE 150 Quartz Barrel Plasma System

Control System

• Programmable logic controller
• Digital count down timer (hrs, min, sec)
• Digital pressure display Gas flow with mass flow controllers
• Single gas input
• Single process

Control System Options

• Nitrogen backfill
• Data logging
• Slow pump and particle reduction Throttle valve

Power Requirements

• 115VAC 15A 50/60HZ
• 220VAC optional
• 115VAC 15A for Vacuum on separate feed

Reactor Chamber

• Quartz chamber 10" dia x 18"L
• Front loading
• View port on front door with UV shield
• 9" x 16" planar electrode
• Front to back gas laminar gas flow
  for +/- 11 nm uniformity

 Dimensions

• Control Module — 20" W x 7.8" H x 20" D
• Chamber Module — 20.4" W x 18.8" H x 36" D
• Shipping Weight — 250 lbs Crated Weight

RF Power Source

• 0-300 Watt, 13.56 MHz
• Forward and reflected power reading
• 3% Power regulation
• Manual matching network

Vacuum System

• 14.7 CFM Standard service with all interconnects, larger pump optional

Vacuum System Options

• Oxygen service
• Corrosive service Mist eliminator
• Slow pump / particle reduction optional