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SP 604 Quartz Barrel Plasma System

Control System

• PLC - "Touch-Panel" operation
• Digital count down timer (hrs, min, sec)
• Digital pressure display Gas flow with mass flow controller(s) Single gas input
• Single process

Control Systems Options

• Two program / two gases Data logging
• Capacitance manometer
• Slow pump and particle reduction Throttle valve
• Nitrogen Backfill

Dimensions

• Control Module — 20"W x 7.8"H x 20"D
• Chamber Module — 20.4"W x 18.8"H x 36"D
• Shipping Weight — 250 lbs Crated weight

Reactor Chamber

• System available with (2) or (4) 4" Dia x 8" Pyrex or Quartz Chambers
• Front loading
• View port on front door with UV shield

Vacuum System

• 23 CFM Standard service with all interconnects Mist Filter

RF Power Source

• 0-600 Watt, 13.56 MHz
• Forward and reflected power reading 3% power regulation
• Optional 300 Watt 13.56 MHz supply Low frequency optional

Vacuum System Options

• Oxygen service