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SCE 10 Tumbler Plasma System

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Control System

• Computer controlled
• Keypad data entry and digital display
• Gas flow with mass flow controllers
• Single gas input

Control System Options

• Additional gas channels
• Capacitance manometer
• Throttle valve
• Nitrogen backfill
• Slow pump and particle reduction

Power Requirements

• 115VAC 20A 50/60HZ
• 220VAC optional
• 115VAC 20A for vacuum on separate feed 

Reactor Chamber Aluminum

• Aluminum Basket
• Front loading
• View port on front door with UV shield

Dimensions

• Standard full height 19" Equipment rack

Vacuum System

• Standard service with all interconnects

RF Power Source

• 0-600 Watt, 13.56 MHz (standard)
• Forward and reflected power reading
• ± 3% Power regulation
• Optional 300 or 1000 Watt 13.56 MHz supply

Vacuum System Options

• Oxygen service
• Corrosive service
• Mist eliminator
• Certain applications may require higher gas through put than standard. Pump needs to be sized accordingly.